A multi-sensing scheme based on nonlinear coupled micromachined resonators

Abstract A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around first lowest modes. The system consists of a mechanically bridge resonator and cantilever resonator. eigenvalue problem solved to identify right geometry for optimize their resonance frequencies based on mode localization order provide outstanding sensitivity. equivalent model developed using Euler–Bernoulli beam theory while accounting geometric electrostatic nonlinearities. sensor's dynamics are explored reduced-order two-mode Galerkin discretization, reveals richness response. To demonstrate proposed sensing scheme, investigated tuning stiffness mass resonators, respectively. With its simple scalable design, shows great potential intelligent detection many applications.